Topic: Chalcogenide, oxide, hydride materials

  • Ing. Jiří JANČÁLEK

  • University of Pardubice, Czech republic

  • Center of Materials and Nanotechnologies

J. Jancalek1*, S. Slang1, K. Palka1,2, M. Kurka1, M. Vlcek1

1 Center of Materials and Nanotechnologies, Faculty of Chemical Technology, University of Pardubice, Studentska 95, 53210 Pardubice, Czech Republic;  

2 Department of General and Inorganic Chemistry, Faculty of Chemical Technology, University of Pardubice, Studentska 95, 53210 Pardubice, Czech Republic

* E-mail: jiri.jancalek@upce.cz

Keywords: spin-coating, chalcogenide glasses, thin films, optical properties, wet etching

Chalcogenide glasses are materials well-known for their desirable optical properties such as a wide transparency in infrared region, high refractive index and frequent sensitivity to various kinds of radiation, mainly in thin film form [1]. Chalcogenide thin films are usually deposited using vacuum based deposition techniques such as vacuum thermal evaporation, sputtering or laser ablation [2]. Perspective alternative way is deposition of thin films from source bulk glass solution in volatile organic bases, usually the aliphatic amines.

Solution based deposition techniques circumvent the problem of possible fractionation occurring in the preparation of thin layers of more complex compositions by vacuum based techniques [2] and allow tailoring of thin film properties through incorporation of (nano)materials  via source solution doping [3,4]. Doped thin film may have significantly modified physico‑chemical properties or some new can be introduced such as photoluminescence [4] or photoconductivity [5].

In our work, we present the study of quaternary As-Ge-Sb-S spin‑coated thin films prepared from mixtures of separately dissolved As40S60 and Ge20Sb5S75 glasses. Thin films of all studied compositions ((As40S60)x(Ge20Sb5S75)100-x ; where x = 0, 25, 50, 75 and 100) showed high optical quality and close composition to the target one. The structure, organic residual content, thickness, optical properties and chemical resistance of prepared thin films were studied in dependence on both annealing temperature and the film composition.

References

  •      Tanaka, K. Shimakawa, Amorphous Chalcogenide Semiconductors and Related Materials, Springler (2011)
  •      Orava, T. Kohoutek, T. Wagner, „Deposition techniques for chalcogenide thin films“, Chalcogenide glasses, Woodhead Publishing Limited (2014)
  •      Palka, S. Slang, J. Jancalek, M. Vlcek, J. Non-Cryst. Solids, 517, 76-82 (2019)
  •      Novak, L. Scvarpantonio, J. Novak, M.D. Pre, A. Martucci, J.D: Musgraves, N.D. McClaneghan, K. Richardson, Opt. Mater. Express, 3, 729-738 (2013)
  •      Khan, P.K. Dwivedi, M. Husain, M. Zulfequar, J. Mater. Sci.: Mater. Electron, 29, 12993-13004 (2018)

Acknowledgments

This work was supported by the financial support from project “High-sensitive and low-density materials based on polymeric nanocomposites” – NANOMAT (CZ.02.1.01/0.0/0.0/17_048/0007376) and grant LM2018103 from the Ministry of Education, Youth and Sports of the Czech Republic.